Publication:

Impact of direct CMP on surface and bulk properties of high porosity low-k materials

Date

2007
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorHeylen, Nancy
dc.contributor.authorSinapi, Fabrice
dc.contributor.authorTravaly, Youssef
dc.contributor.authorVereecke, Guy
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorCarbonell, Laure
dc.contributor.authorVan Hoeymissen, Jan
dc.contributor.authorHellin, David
dc.contributor.authorHernandez, Jose Luis
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorHellin, David
dc.contributor.imecauthorHernandez, Jose Luis
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.date.accessioned2021-10-16T16:39:06Z
dc.date.available2021-10-16T16:39:06Z
dc.date.embargo9999-12-31
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12292
dc.source.beginpage549
dc.source.conferenceAdvanced Metallization Conference 2006
dc.source.conferencedate17/10/2006
dc.source.conferencelocationSan Diego, CA USA
dc.source.endpage563
dc.title

Impact of direct CMP on surface and bulk properties of high porosity low-k materials

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
13076.pdf
Size:
1.08 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions