Epitaxial chemical vapor deposition of silicon on an oxygen monolayer on Si(100) substrates

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Author(s)

Delabie, Annelies

;

Jayachandran, Suseendran

;

;

;

;

Pourtois, Geoffrey

;

Douhard, Bastien

;

Conard, Thierry

;

Meersschaut, Johan

;

;

Vandervorst, Wilfried

;

Journal

ECS Solid State Letters

Metrics

1872 since deposited on 2021-10-21

Acq. date: 2025-10-26