Publication:

Lithography options for the 32nm half pitch node and beyond

Date

2009

Journal article

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Files

19205.pdf 3.01 MB

Author(s)

;

Jansen, Philippe

;

;

Hendrickx, Eric

;

Maenhoudt, Mireille

;

;

Goethals, Mieke

;

Jonckheere, Rik

;

Vandenberghe, Geert

Journal

IEEE Transactions on Circuits and Systems I: Regular Papers

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