Publication:

Lithography options for the 32nm half pitch node and beyond

Date

2009

Journal article

Simple item page Full metadata Statistics

Files

19205.pdf 3.01 MB

Author(s)

;

Jansen, Philippe

;

;

Hendrickx, Eric

;

Maenhoudt, Mireille

;

;

Goethals, Mieke

;

Jonckheere, Rik

;

Vandenberghe, Geert

Journal

IEEE Transactions on Circuits and Systems I: Regular Papers

Statistics

1878 since deposited on 2021-10-18

1last month

Acq. date: 2026-03-17