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Multi-VT Options at Scaled Vertical Pitch in Gate-All-Around Nanosheet Devices by Independent Inner-Outer Work-function Tuning
Publication:
Multi-VT Options at Scaled Vertical Pitch in Gate-All-Around Nanosheet Devices by Independent Inner-Outer Work-function Tuning
Date
2024
Proceedings Paper
https://doi.org/10.1109/EDTM58488.2024.10512044
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Gaddemane, Gautam
;
Bhuwalka, Krishna
;
Rzepa, Gerhard
;
Schuddinck, Pieter
;
Arimura, Hiroaki
;
Matagne, Philippe
;
Wu, Hao
;
Horiguchi, Naoto
;
Hellings, Geert
;
Liu, Changze
Journal
N/A
Abstract
Description
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129
since deposited on 2024-09-14
Acq. date: 2025-10-25
Citations
Metrics
Views
129
since deposited on 2024-09-14
Acq. date: 2025-10-25
Citations