Publication:
Multi-VT Options at Scaled Vertical Pitch in Gate-All-Around Nanosheet Devices by Independent Inner-Outer Work-function Tuning
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133 since deposited on 2024-09-14
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Acq. date: 2026-01-26
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133 since deposited on 2024-09-14
1last month
1last week
Acq. date: 2026-01-26
Citations