Publication:

Multi-VT Options at Scaled Vertical Pitch in Gate-All-Around Nanosheet Devices by Independent Inner-Outer Work-function Tuning

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169 since deposited on 2024-09-14
19last month
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Acq. date: 2026-09-18

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169 since deposited on 2024-09-14
19last month
6last week
Acq. date: 2026-09-18

Citations