Publication:

Multi-VT Options at Scaled Vertical Pitch in Gate-All-Around Nanosheet Devices by Independent Inner-Outer Work-function Tuning

Date

Loading...
Thumbnail Image

Abstract

Description

Statistics

Views

135 since deposited on 2024-09-14
2last month
1last week
Acq. date: 2026-03-17

Citations

Statistics

Views

135 since deposited on 2024-09-14
2last month
1last week
Acq. date: 2026-03-17

Citations