Publication:
Multi-VT Options at Scaled Vertical Pitch in Gate-All-Around Nanosheet Devices by Independent Inner-Outer Work-function Tuning
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131 since deposited on 2024-09-14
Acq. date: 2025-12-13
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Views
131 since deposited on 2024-09-14
Acq. date: 2025-12-13
Citations