Publication:

Effects of interactions between HfO2 and poly-Si on MOSCAP and MESFET electrical behaviour

Date

2003

Proceedings Paper

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Author(s)

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De Gendt, Stefan

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Delabie, Annelies

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Van Elshocht, Sven

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;

Shimamoto, Yasuhiro

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Ragnarsson, Lars-Ake

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Witters, Thomas

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Statistics

1916 since deposited on 2021-10-15

Acq. date: 2026-04-06