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Effects of interactions between HfO2 and poly-Si on MOSCAP and MESFET electrical behaviour
Publication:
Effects of interactions between HfO2 and poly-Si on MOSCAP and MESFET electrical behaviour
Date
2003
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kaushik, Vidya
;
Röhr, Erika
;
De Gendt, Stefan
;
Delabie, Annelies
;
Van Elshocht, Sven
;
Claes, Martine
;
Shimamoto, Yasuhiro
;
Ragnarsson, Lars-Ake
;
Witters, Thomas
;
Manabe, Y.
;
Heyns, Marc
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1910
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1910
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations