Publication:
Pore sealing of k 2.0 dielectrics assisted by self-assembled monolayers deposited from vapor phase
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1940 since deposited on 2021-10-22
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Acq. date: 2026-01-11
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1940 since deposited on 2021-10-22
2last month
1last week
Acq. date: 2026-01-11
Citations