Publication:
Pore sealing of k 2.0 dielectrics assisted by self-assembled monolayers deposited from vapor phase
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1938 since deposited on 2021-10-22
1last month
Acq. date: 2025-12-15
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Metrics
Views
1938 since deposited on 2021-10-22
1last month
Acq. date: 2025-12-15
Citations