Publication:

Pore sealing of k 2.0 dielectrics assisted by self-assembled monolayers deposited from vapor phase

Date

2014
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorArmini, Silvia
dc.contributor.authorLoyo Prado, Jana
dc.contributor.authorKrishtab, Mikhail
dc.contributor.authorSwerts, Johan
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorConard, Thierry
dc.contributor.authorBlauw, Michiel
dc.contributor.authorStruyf, Herbert
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorLoyo Prado, Jana
dc.contributor.imecauthorKrishtab, Mikhail
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.accessioned2021-10-22T00:44:07Z
dc.date.available2021-10-22T00:44:07Z
dc.date.issued2014
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23504
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S016793171300590X
dc.source.beginpage240
dc.source.endpage245
dc.source.journalMicroelectronic Engineering
dc.source.volume120
dc.title

Pore sealing of k 2.0 dielectrics assisted by self-assembled monolayers deposited from vapor phase

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections:
Articles