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Low temperature influence on long channel STI last process relaxed and strained Ge pFinFETs
Publication:
Low temperature influence on long channel STI last process relaxed and strained Ge pFinFETs
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Date
2017
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Oliveira, Alberto
;
Agopian, Paula
;
Martino, Joao
;
Simoen, Eddy
;
Mitard, Jerome
;
Witters, Liesbeth
;
Collaert, Nadine
;
Claeys, Cor
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1912
since deposited on 2021-10-24
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Acq. date: 2025-12-11
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Metrics
Views
1912
since deposited on 2021-10-24
2
last month
Acq. date: 2025-12-11
Citations