Publication:

Higher-k ALD Sr-rich SrTiO3 for DRAM MIMCAP Application

Date

2013
Meeting abstract
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Author(s)

Tomida, Kazuyuki  
;
Swerts, Johan  
;
Popovici, Mihaela Ioana  
;
Kaczer, Ben  
;
Clima, Sergiu  
;
Pawlak, Malgorzata
;
Kim, Min-Soo  
;
Afanasiev, Valeri  
;
Kittl, Jorge
;
Jurczak, Gosia  

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Abstract

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