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Higher-k ALD Sr-rich SrTiO3 for DRAM MIMCAP Application

Date

2013
Meeting abstract
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dc.contributor.authorTomida, Kazuyuki
dc.contributor.authorSwerts, Johan
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorKaczer, Ben
dc.contributor.authorClima, Sergiu
dc.contributor.authorPawlak, Malgorzata
dc.contributor.authorKim, Min-Soo
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorKittl, Jorge
dc.contributor.authorJurczak, Gosia
dc.contributor.imecauthorTomida, Kazuyuki
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorClima, Sergiu
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecClima, Sergiu::0000-0002-4044-9975
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.date.accessioned2021-10-21T12:49:35Z
dc.date.available2021-10-21T12:49:35Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23179
dc.identifier.urlhttps://www.nims.go.jp/nimsconf/2013/DetailedProgram.html
dc.source.beginpageOS4-12
dc.source.conference2013 NIMS Cconference
dc.source.conferencedate1/07/2013
dc.source.conferencelocationTsukuba Japan
dc.title

Higher-k ALD Sr-rich SrTiO3 for DRAM MIMCAP Application

dc.typeMeeting abstract
dspace.entity.typePublication
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