Publication:

A snapshot review on metal-semiconductor contact exploration for 7-nm CMOS technology and beyond

Date

2022-11-21
Journal Article Review
https://doi.org/10.1557/s43580-022-00404-1
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Published version 3.27 MB
Accepted version 2.32 MB

Author(s)

Yu, Hao  
;
Schaekers, Marc  
;
Everaert, Jean-Luc
;
Horiguchi, Naoto  
;
De Meyer, Kristin  
;
Collaert, Nadine  

Journal

MRS ADVANCES

Abstract

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322 since deposited on 2022-12-05
Acq. date: 2025-10-23

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1545 since deposited on 2022-12-05
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322 since deposited on 2022-12-05
Acq. date: 2025-10-23

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1545 since deposited on 2022-12-05
Acq. date: 2025-10-23

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