Publication:
SSRM & SCM observation of modified lateral diffusion of As, BF2 and Sb induced by nitride spacers
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1885 since deposited on 2021-10-14
1last month
Acq. date: 2026-05-01
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1885 since deposited on 2021-10-14
1last month
Acq. date: 2026-05-01
Citations