Publication:

Shallow boron implantations in Ge and the role of the pre-amorphization depth

Date

2008

Journal article

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Files

19499.pdf 445.34 KB

Author(s)

;

;

Satta, Alessandra

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;

;

Parmentier, Brigitte

;

Clarysse, Trudo

;

Goossens, Jozefien

;

Vandervorst, Wilfried

;

Journal

Materials Science in Semiconductor Processing

Statistics

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