Publication:

Process-Induced Stress in LOPOS Isolated Si Structures Measured with Micro-Raman Spectroscopy

Date

1995

Presentation

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Author(s)

;

;

Silverans, R. E.

;

De Wolf, Ingrid

;

Statistics

2031 since deposited on 2021-09-29

Acq. date: 2026-05-02