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Process-Induced Stress in LOPOS Isolated Si Structures Measured with Micro-Raman Spectroscopy
Publication:
Process-Induced Stress in LOPOS Isolated Si Structures Measured with Micro-Raman Spectroscopy
Date
1995
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Watté, J.
;
Provoost, R.
;
Silverans, R. E.
;
De Wolf, Ingrid
;
Maes, Herman
Journal
Abstract
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2026
since deposited on 2021-09-29
Acq. date: 2025-10-24
Citations
Metrics
Views
2026
since deposited on 2021-09-29
Acq. date: 2025-10-24
Citations