Process-Induced Stress in LOPOS Isolated Si Structures Measured with Micro-Raman Spectroscopy

dc.contributor.author	Watté, J.
dc.contributor.author	Provoost, R.
dc.contributor.author	Silverans, R. E.
dc.contributor.author	De Wolf, Ingrid
dc.contributor.author	Maes, Herman
dc.contributor.imecauthor	De Wolf, Ingrid
dc.contributor.orcidimec	De Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned	2021-09-29T13:25:26Z
dc.date.available	2021-09-29T13:25:26Z
dc.date.issued	1995
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/1009
dc.source.conference	Annual Meeting of the Belgian Physical Society; May 1995;
dc.source.conferencelocation
dc.title	Process-Induced Stress in LOPOS Isolated Si Structures Measured with Micro-Raman Spectroscopy
dc.type	Oral presentation
dspace.entity.type	Publication
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