Publication:
Electron trap energy distribution in ALD Al2O3, LaAl4Ox, and GdyAl2-yO3 layers on silicon
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1858 since deposited on 2021-10-20
1last month
Acq. date: 2025-12-10
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1858 since deposited on 2021-10-20
1last month
Acq. date: 2025-12-10
Citations