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Selective epitaxial growth of InP in STI trenches on off-axis Si(001) substrates
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Selective epitaxial growth of InP in STI trenches on off-axis Si(001) substrates
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Date
2010
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wang, Gang
;
Nguyen, Duy
;
Leys, Maarten
;
Loo, Roger
;
Richard, Olivier
;
Brammertz, Guy
;
Meuris, Marc
;
Heyns, Marc
;
Caymax, Matty
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1789
since deposited on 2021-10-19
Acq. date: 2025-12-15
Citations
Metrics
Views
1789
since deposited on 2021-10-19
Acq. date: 2025-12-15
Citations