Publication:

Selective epitaxial growth of InP in STI trenches on off-axis Si(001) substrates

Date

2010
Proceedings Paper
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dc.contributor.authorWang, Gang
dc.contributor.authorNguyen, Duy
dc.contributor.authorLeys, Maarten
dc.contributor.authorLoo, Roger
dc.contributor.authorRichard, Olivier
dc.contributor.authorBrammertz, Guy
dc.contributor.authorMeuris, Marc
dc.contributor.authorHeyns, Marc
dc.contributor.authorCaymax, Matty
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBrammertz, Guy
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecBrammertz, Guy::0000-0003-1404-7339
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.accessioned2021-10-19T00:17:01Z
dc.date.available2021-10-19T00:17:01Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18332
dc.source.beginpage959
dc.source.conferenceChina Semiconductor Technology International Conference - CSTIC
dc.source.conferencedate18/03/2010
dc.source.conferencelocationShanghai China
dc.source.endpage964
dc.title

Selective epitaxial growth of InP in STI trenches on off-axis Si(001) substrates

dc.typeProceedings paper
dspace.entity.typePublication
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