Publication:
Limitations of shift-and-ratio based Leff extraction techniques for MOS transistors with halo or pocket implants
Date
| dc.contributor.author | van Meer, Hans | |
| dc.contributor.author | Henson, Kirklen | |
| dc.contributor.author | Lyu, Jeong-ho | |
| dc.contributor.author | Rosmeulen, Maarten | |
| dc.contributor.author | Kubicek, Stefan | |
| dc.contributor.author | Collaert, Nadine | |
| dc.contributor.author | De Meyer, Kristin | |
| dc.contributor.imecauthor | Rosmeulen, Maarten | |
| dc.contributor.imecauthor | Kubicek, Stefan | |
| dc.contributor.imecauthor | Collaert, Nadine | |
| dc.contributor.imecauthor | De Meyer, Kristin | |
| dc.contributor.orcidimec | Rosmeulen, Maarten::0000-0002-3663-7439 | |
| dc.contributor.orcidimec | Collaert, Nadine::0000-0002-8062-3165 | |
| dc.date.accessioned | 2021-10-14T14:02:29Z | |
| dc.date.available | 2021-10-14T14:02:29Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4843 | |
| dc.source.beginpage | 133 | |
| dc.source.endpage | 136 | |
| dc.source.issue | 3 | |
| dc.source.journal | IEEE Electron Device Letters | |
| dc.source.volume | 21 | |
| dc.title | Limitations of shift-and-ratio based Leff extraction techniques for MOS transistors with halo or pocket implants | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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| Publication available in collections: |