Publication:

Replacement metal contact using sacrificial ILD0 for wrap around contact in scaled FinFET technology

Date

2018
Proceedings Paper
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Author(s)

Chew, Soon Aik
;
Demuynck, Steven  
;
Zhang, Liping  
;
Pacco, Antoine  
;
Devriendt, Katia  
;
Teugels, Lieve  
;
Hopf, Toby  
;
Versluijs, Janko  
;
Vrancken, Christa  
;
Dangol, Anish  
;
Altamirano Sanchez, Efrain  
;
Mocuta, Dan
;
Horiguchi, Naoto  

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