Publication:
Replacement metal contact using sacrificial ILD0 for wrap around contact in scaled FinFET technology
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
1972 since deposited on 2021-10-25
Acq. date: 2026-02-25
Citations
Statistics
Views
1972 since deposited on 2021-10-25
Acq. date: 2026-02-25
Citations