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Defect analysis of n-type silicon strained layers
Publication:
Defect analysis of n-type silicon strained layers
Date
2001
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Simoen, Eddy
;
Loo, Roger
;
Roussel, Philippe
;
Caymax, Matty
;
Bender, Hugo
;
Claeys, Cor
;
Herzog, H. J.
;
Blondeel, A.
;
Clauws, P.
Journal
Materials Science in Semiconductor Processing
Abstract
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1955
since deposited on 2021-10-14
Acq. date: 2025-10-22
Citations
Metrics
Views
1955
since deposited on 2021-10-14
Acq. date: 2025-10-22
Citations