Publication:
Defect analysis of n-type silicon strained layers
Date
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Roussel, Philippe | |
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.author | Herzog, H. J. | |
| dc.contributor.author | Blondeel, A. | |
| dc.contributor.author | Clauws, P. | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.imecauthor | Roussel, Philippe | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.contributor.orcidimec | Roussel, Philippe::0000-0002-0402-8225 | |
| dc.date.accessioned | 2021-10-14T17:51:29Z | |
| dc.date.available | 2021-10-14T17:51:29Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5665 | |
| dc.source.beginpage | 225 | |
| dc.source.endpage | 227 | |
| dc.source.journal | Materials Science in Semiconductor Processing | |
| dc.source.volume | 4 | |
| dc.title | Defect analysis of n-type silicon strained layers | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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