Publication:

Improving the electrical properties of epitaxial SiGe:B with excimer laser annealing treatments

Date

2019

Meeting abstract

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Author(s)

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Porret, Clément

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Hikavyy, Andriy

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Rengo, Gianluca

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Petersen Barbosa Lima, Lucas

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Mazzamuto, Fulvio

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Tabata, Toshiyuki

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Metrics

1954 since deposited on 2021-10-27

3last month

Acq. date: 2026-01-08