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Improving the electrical properties of epitaxial SiGe:B with excimer laser annealing treatments

Date

2019
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dc.contributor.authorHuang, Yan-Hua
dc.contributor.authorPorret, Clément
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorRengo, Gianluca
dc.contributor.authorPetersen Barbosa Lima, Lucas
dc.contributor.authorKhazaka, Rami
dc.contributor.authorKohen, David
dc.contributor.authorMargetis, Joe
dc.contributor.authorTolle, John
dc.contributor.authorMazzamuto, Fulvio
dc.contributor.authorTabata, Toshiyuki
dc.contributor.authorHeyns, Marc
dc.contributor.authorLoo, Roger
dc.contributor.imecauthorPorret, Clément
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorRengo, Gianluca
dc.contributor.imecauthorPetersen Barbosa Lima, Lucas
dc.contributor.imecauthorKhazaka, Rami
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecPorret, Clément::0000-0002-4561-348X
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2021-10-27T10:35:59Z
dc.date.available2021-10-27T10:35:59Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33176
dc.source.conference2019 E-MRS Fall Meeting
dc.source.conferencedate16/09/2019
dc.source.conferencelocationWarsaw Poland
dc.title

Improving the electrical properties of epitaxial SiGe:B with excimer laser annealing treatments

dc.typeMeeting abstract
dspace.entity.typePublication
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