Publication:

Sr excess accommodation in ALD grown SrTiO3 and its impact on the dielectric response

Date

2009

Journal article

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Files

18212.pdf 506.59 KB

Author(s)

;

Pourtois, Geoffrey

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;

Popovici, Mihaela Ioana

;

Rothschild, Aude

;

;

Van Elshocht, Sven

;

;

;

Pierreux, Dieter

;

De Gendt, Stefan

;

;

Journal

Microelectronic Engineering

Statistics

1886 since deposited on 2021-10-17

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Acq. date: 2026-08-04