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Fundamental study of the removal mechanisms of nano-sized particles using brush scrubber cleaning
Publication:
Fundamental study of the removal mechanisms of nano-sized particles using brush scrubber cleaning
Date
2005
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Xu, Kaidong
;
Vos, Rita
;
Vereecke, Guy
;
Doumen, Geert
;
Fyen, Wim
;
Mertens, Paul
;
Heyns, Marc
;
Vinckier, Chris
;
Fransaer, J.
;
Kovacs, F.
Journal
Journal of Vacuum Science and Technology B
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2045
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
2045
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations