Publication:

Fundamental study of the removal mechanisms of nano-sized particles using brush scrubber cleaning

Date

2005
Journal article
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dc.contributor.authorXu, Kaidong
dc.contributor.authorVos, Rita
dc.contributor.authorVereecke, Guy
dc.contributor.authorDoumen, Geert
dc.contributor.authorFyen, Wim
dc.contributor.authorMertens, Paul
dc.contributor.authorHeyns, Marc
dc.contributor.authorVinckier, Chris
dc.contributor.authorFransaer, J.
dc.contributor.authorKovacs, F.
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorDoumen, Geert
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.date.accessioned2021-10-16T07:16:15Z
dc.date.available2021-10-16T07:16:15Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11576
dc.source.beginpage2160
dc.source.endpage2175
dc.source.issue5
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.volume23
dc.title

Fundamental study of the removal mechanisms of nano-sized particles using brush scrubber cleaning

dc.typeJournal article
dspace.entity.typePublication
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