Publication:

Trap-polarization interaction during low-field trap characterization on hafnia-based ferroelectric gatestacks

Date

2022
Proceedings Paper
https://doi.org/10.1109/IRPS48227.2022.9764603
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dc.contributor.authorTruijen, Brecht
dc.contributor.authorO'Sullivan, Barry
dc.contributor.authorAlam, Md Nur Kutubul
dc.contributor.authorClaes, Dieter
dc.contributor.authorThesberg, M.
dc.contributor.authorRoussel, Philippe
dc.contributor.authorVaisman Chasin, Adrian
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorKaczer, Ben
dc.contributor.authorVan Houdt, Jan
dc.contributor.imecauthorTruijen, Brecht
dc.contributor.imecauthorO'Sullivan, Barry
dc.contributor.imecauthorAlam, Md Nur Kutubul
dc.contributor.imecauthorClaes, Dieter
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorVaisman Chasin, Adrian
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecTruijen, Brecht::0000-0002-2288-1414
dc.contributor.orcidimecO'Sullivan, Barry::0000-0002-9036-8241
dc.contributor.orcidimecAlam, Md Nur Kutubul::0000-0002-4608-3556
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimecVaisman Chasin, Adrian::0000-0002-9940-0260
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.accessioned2023-06-02T07:44:45Z
dc.date.available2023-02-27T03:28:20Z
dc.date.available2023-06-02T07:44:45Z
dc.date.embargo9999-12-31
dc.date.issued2022
dc.identifier.doi10.1109/IRPS48227.2022.9764603
dc.identifier.eisbn978-1-6654-7950-9
dc.identifier.issn1541-7026
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41176
dc.publisherIEEE
dc.source.conferenceIEEE International Reliability Physics Symposium (IRPS)
dc.source.conferencedateMAR 27-31, 2022
dc.source.conferencelocationDallas
dc.source.journalna
dc.source.numberofpages4
dc.title

Trap-polarization interaction during low-field trap characterization on hafnia-based ferroelectric gatestacks

dc.typeProceedings paper
dspace.entity.typePublication
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