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Comparison of Electrical Performance of Co-Integrated Forksheets and Nanosheets Transistors for the 2nm Technological Node and Beyond
Publication:
Comparison of Electrical Performance of Co-Integrated Forksheets and Nanosheets Transistors for the 2nm Technological Node and Beyond
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Date
2021
Proceedings Paper
https://doi.org/10.1109/IEDM19574.2021.9720524
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ritzenthaler, Romain
;
Mertens, Hans
;
Eneman, Geert
;
Simoen, Eddy
;
Bury, Erik
;
Eyben, Pierre
;
Bufler, Fabian
;
Oniki, Yusuke
;
Briggs, Basoene
;
Chan, BT
;
Hikavyy, Andriy
;
Mannaert, Geert
;
Parvais, Bertrand
;
Vaisman Chasin, Adrian
;
Mitard, Jerome
;
Dentoni Litta, Eugenio
;
Samavedam, Sri
;
Horiguchi, Naoto
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na
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1623
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Acq. date: 2026-01-06
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Views
1623
since deposited on 2022-07-09
2
last month
1
last week
Acq. date: 2026-01-06
Citations