Publication:

Comparison of Electrical Performance of Co-Integrated Forksheets and Nanosheets Transistors for the 2nm Technological Node and Beyond

Date

2021
Proceedings Paper
https://doi.org/10.1109/IEDM19574.2021.9720524
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dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorMertens, Hans
dc.contributor.authorEneman, Geert
dc.contributor.authorSimoen, Eddy
dc.contributor.authorBury, Erik
dc.contributor.authorEyben, Pierre
dc.contributor.authorBufler, Fabian
dc.contributor.authorOniki, Yusuke
dc.contributor.authorBriggs, Basoene
dc.contributor.authorChan, BT
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorMannaert, Geert
dc.contributor.authorParvais, Bertrand
dc.contributor.authorVaisman Chasin, Adrian
dc.contributor.authorMitard, Jerome
dc.contributor.authorDentoni Litta, Eugenio
dc.contributor.authorSamavedam, Sri
dc.contributor.authorHoriguchi, Naoto
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorBury, Erik
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorBufler, Fabian
dc.contributor.imecauthorOniki, Yusuke
dc.contributor.imecauthorBriggs, Basoene
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorMannaert, Geert
dc.contributor.imecauthorParvais, Bertrand
dc.contributor.imecauthorVaisman Chasin, Adrian
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorDentoni Litta, Eugenio
dc.contributor.imecauthorSamavedam, Sri
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecBury, Erik::0000-0002-5847-3949
dc.contributor.orcidimecEyben, Pierre::0000-0003-3686-556X
dc.contributor.orcidimecBufler, Fabian::0000-0002-1558-9378
dc.contributor.orcidimecOniki, Yusuke::0000-0002-6619-1327
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecParvais, Bertrand::0000-0003-0769-7069
dc.contributor.orcidimecVaisman Chasin, Adrian::0000-0002-9940-0260
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecDentoni Litta, Eugenio::0000-0003-0333-376X
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.accessioned2022-08-25T13:47:31Z
dc.date.available2022-07-09T02:27:44Z
dc.date.available2022-08-25T13:47:31Z
dc.date.issued2021
dc.identifier.doi10.1109/IEDM19574.2021.9720524
dc.identifier.eisbn978-1-6654-2572-8
dc.identifier.issn2380-9248
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40089
dc.publisherIEEE
dc.source.conferenceIEEE International Electron Devices Meeting (IEDM)
dc.source.conferencedateDEC 11-16, 2021
dc.source.conferencelocationSan Francisco
dc.source.journalna
dc.source.numberofpages4
dc.title

Comparison of Electrical Performance of Co-Integrated Forksheets and Nanosheets Transistors for the 2nm Technological Node and Beyond

dc.typeProceedings paper
dspace.entity.typePublication
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