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Articles
MEMS reliability from a failure mechanisms
Publication:
MEMS reliability from a failure mechanisms
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Date
2003
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7641.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
van Spengen, Merlijn
Journal
Microelectronics Reliability
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1849
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Acq. date: 2025-12-09
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Metrics
Views
1849
since deposited on 2021-10-15
4
last month
Acq. date: 2025-12-09
Citations