Publication:
MEMS reliability from a failure mechanisms
Date
| dc.contributor.author | van Spengen, Merlijn | |
| dc.date.accessioned | 2021-10-15T07:20:21Z | |
| dc.date.available | 2021-10-15T07:20:21Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8298 | |
| dc.source.beginpage | 1049 | |
| dc.source.endpage | 1060 | |
| dc.source.issue | 7 | |
| dc.source.journal | Microelectronics Reliability | |
| dc.source.volume | 43 | |
| dc.title | MEMS reliability from a failure mechanisms | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |