Publication:
Interaction of F atoms with SiCOH ultra low-k films. Part I: Fluorination and damage
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1925 since deposited on 2021-10-22
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Acq. date: 2025-10-25
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Views
1925 since deposited on 2021-10-22
417item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations