Publication:
Identification of Si film traps in p-channel SOI FinFETs using low temperature noise spectroscopy
Date
| dc.contributor.author | Achour, H. | |
| dc.contributor.author | Cretu, B. | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Routoure, J.M. | |
| dc.contributor.author | Carin, R. | |
| dc.contributor.author | Benfdila, A. | |
| dc.contributor.author | Aoulaiche, Marc | |
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-22T18:29:48Z | |
| dc.date.available | 2021-10-22T18:29:48Z | |
| dc.date.issued | 2015 | |
| dc.identifier.issn | 0038-1101 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24912 | |
| dc.identifier.url | http://www.sciencedirect.com/science/article/pii/S0038110115000593 | |
| dc.source.beginpage | 1 | |
| dc.source.endpage | 6 | |
| dc.source.journal | Solid-State Electronics | |
| dc.source.volume | 112 | |
| dc.title | Identification of Si film traps in p-channel SOI FinFETs using low temperature noise spectroscopy | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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