Publication:

Area-Selective Deposition of Ruthenium by Area-Dependent Surface Diffusion

Date

2020
Journal article
https://doi.org/10.1021/acs.chemmater.0c02588
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Author(s)

Grillo, Fabio
;
Soethoudt, Job  
;
Marques, Esteban  
;
de Martin, Lilian
;
Van Dongen, Kaat  
;
van Ommen, J. Ruud
;
Delabie, Annelies  

Journal

CHEMISTRY OF MATERIALS

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1817 since deposited on 2021-11-02
Acq. date: 2026-07-21

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1817 since deposited on 2021-11-02
Acq. date: 2026-07-21

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