Publication:

Area-Selective Deposition of Ruthenium by Area-Dependent Surface Diffusion

Date

2020
Journal article
https://doi.org/10.1021/acs.chemmater.0c02588
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dc.contributor.authorGrillo, Fabio
dc.contributor.authorSoethoudt, Job
dc.contributor.authorMarques, Esteban
dc.contributor.authorde Martin, Lilian
dc.contributor.authorVan Dongen, Kaat
dc.contributor.authorvan Ommen, J. Ruud
dc.contributor.authorDelabie, Annelies
dc.contributor.imecauthorSoethoudt, Job
dc.contributor.imecauthorMarques, Esteban A.
dc.contributor.imecauthorVan Dongen, Kaat
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorMarques, Esteban
dc.contributor.orcidextGrillo, Fabio::0000-0003-1486-3117
dc.contributor.orcidextvan Ommen, J. Ruud::0000-0001-7884-0323
dc.contributor.orcidimecMarques, Esteban A.::0000-0003-0322-3827
dc.date.accessioned2022-01-06T12:45:06Z
dc.date.available2021-11-02T16:06:30Z
dc.date.available2022-01-06T12:45:06Z
dc.date.issued2020
dc.identifier.doi10.1021/acs.chemmater.0c02588
dc.identifier.issn0897-4756
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38282
dc.publisherAMER CHEMICAL SOC
dc.source.beginpage9560
dc.source.endpage9572
dc.source.issue22
dc.source.journalCHEMISTRY OF MATERIALS
dc.source.numberofpages13
dc.source.volume32
dc.title

Area-Selective Deposition of Ruthenium by Area-Dependent Surface Diffusion

dc.typeJournal article
dspace.entity.typePublication
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