Publication:
Extensional mode SiGe MEM-resonators: design, modelling and fabrication
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1867 since deposited on 2021-10-18
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Acq. date: 2026-07-26
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Statistics
Views
1867 since deposited on 2021-10-18
1last month
1last week
Acq. date: 2026-07-26
Citations