Publication:

Extensional mode SiGe MEM-resonators: design, modelling and fabrication

Date

2010-12
Dissertation
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dc.contributor.authorStoffels, Steve
dc.contributor.imecauthorStoffels, Steve
dc.contributor.thesisadvisorPuers, Bob
dc.contributor.thesisadvisorMertens, Robert
dc.date.accessioned2021-10-18T22:00:35Z
dc.date.available2021-10-18T22:00:35Z
dc.date.embargo9999-12-31
dc.date.issued2010-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18043
dc.title

Extensional mode SiGe MEM-resonators: design, modelling and fabrication

dc.typePHD thesis
dspace.entity.typePublication
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