Improved hot-carrier reliability in a 0.5-µm TLM CMOS process by back-end process optimization

dc.contributor.author	Van den Bosch, Geert
dc.contributor.author	Deferm, Ludo
dc.contributor.author	Forester, Lynn
dc.contributor.author	Collins, Tom
dc.contributor.imecauthor	Van den Bosch, Geert
dc.contributor.imecauthor	Deferm, Ludo
dc.contributor.orcidimec	Van den Bosch, Geert::0000-0001-9971-6954
dc.date.accessioned	2021-09-29T12:49:15Z
dc.date.available	2021-09-29T12:49:15Z
dc.date.embargo	9999-12-31
dc.date.issued	1994
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/385
dc.source.beginpage	303
dc.source.conference	24th European Solid State Device Research Conference - ESSDERC
dc.source.conferencedate	11/09/1994
dc.source.conferencelocation	Edinburgh UK
dc.source.endpage	306
dc.title	Improved hot-carrier reliability in a 0.5-µm TLM CMOS process by back-end process optimization
dc.type	Proceedings paper
dspace.entity.type	Publication
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