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22nm node imaging and beyond: When will EUV take over?
Publication:
22nm node imaging and beyond: When will EUV take over?
Date
2010
Proceedings Paper
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21602.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
van Setten, Eelco
;
Mouraille, Orion
;
Wittebrood, Friso
;
Dusa, Mircea
;
van Ingen-Schenau, Koen
;
Finders, Jo
;
Feenstra, Kees
;
Bekaert, Joost
;
Laenens, Bart
;
Philipsen, Vicky
;
Ercken, Monique
;
Hendrickx, Eric
;
Vandenberghe, Geert
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1983
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations
Metrics
Views
1983
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations