Publication:

22nm node imaging and beyond: When will EUV take over?

Date

2010
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorvan Setten, Eelco
dc.contributor.authorMouraille, Orion
dc.contributor.authorWittebrood, Friso
dc.contributor.authorDusa, Mircea
dc.contributor.authorvan Ingen-Schenau, Koen
dc.contributor.authorFinders, Jo
dc.contributor.authorFeenstra, Kees
dc.contributor.authorBekaert, Joost
dc.contributor.authorLaenens, Bart
dc.contributor.authorPhilipsen, Vicky
dc.contributor.authorErcken, Monique
dc.contributor.authorHendrickx, Eric
dc.contributor.authorVandenberghe, Geert
dc.contributor.imecauthorDusa, Mircea
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorPhilipsen, Vicky
dc.contributor.imecauthorErcken, Monique
dc.contributor.imecauthorHendrickx, Eric
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.contributor.orcidimecPhilipsen, Vicky::0000-0002-2959-432X
dc.date.accessioned2021-10-18T23:14:22Z
dc.date.available2021-10-18T23:14:22Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18202
dc.source.conferenceInternational Symposium on Extreme Ultraviolet Lithography
dc.source.conferencedate18/10/2010
dc.source.conferencelocationKobe Japan
dc.title

22nm node imaging and beyond: When will EUV take over?

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
21602.pdf
Size:
9.14 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions