Publication:

Impact of Al2O3 position on performances and reliability in high-k metal gated DRAM periphery transistors

Date

2013

Proceedings Paper

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Files

26884.pdf 535.38 KB

Author(s)

Aoulaiche, Marc

;

Federico, Antonio

;

;

Ritzenthaler, Romain

;

;

Arimura, Hiroaki

;

;

Kauerauf, Thomas

;

;

Spessot, Alessio

;

Caillat, Christian

;

;

;

;

Noh, Kyung Bong

;

Groeseneken, Guido

;

Horiguchi, Naoto

;

Statistics

2027 since deposited on 2021-10-21

Acq. date: 2026-01-26