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Effect of implantation oxide on the Ti- and Co-silicidation of narrow diffusion and poly-lines
Publication:
Effect of implantation oxide on the Ti- and Co-silicidation of narrow diffusion and poly-lines
Date
1998
Journal article
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2834.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lauwers, Anne
;
Naem, Abdalla
;
de Potter de ten Broeck, Muriel
;
Maex, Karen
Journal
Thin Solid Films
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1947
since deposited on 2021-09-30
Acq. date: 2025-10-23
Citations
Metrics
Views
1947
since deposited on 2021-09-30
Acq. date: 2025-10-23
Citations