Effect of implantation oxide on the Ti- and Co-silicidation of narrow diffusion and poly-lines

dc.contributor.author	Lauwers, Anne
dc.contributor.author	Naem, Abdalla
dc.contributor.author	de Potter de ten Broeck, Muriel
dc.contributor.author	Maex, Karen
dc.contributor.imecauthor	Lauwers, Anne
dc.contributor.imecauthor	de Potter de ten Broeck, Muriel
dc.contributor.imecauthor	Maex, Karen
dc.date.accessioned	2021-09-30T12:31:57Z
dc.date.available	2021-09-30T12:31:57Z
dc.date.embargo	9999-12-31
dc.date.issued	1998
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/2711
dc.source.beginpage	122
dc.source.endpage	127
dc.source.journal	Thin Solid Films
dc.source.volume	320
dc.title	Effect of implantation oxide on the Ti- and Co-silicidation of narrow diffusion and poly-lines
dc.type	Journal article
dspace.entity.type	Publication
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