Publication:

Defect-free isolation on high-thermal-conductivity SOI substrates for complementary BiCMOS technology

Date

2009

Proceedings Paper

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Files

18897.pdf 387.41 KB

Author(s)

Van Wichelen, Koen

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Devriendt, Katia

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Vandevelde, Bart

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Soonekindt, Christophe

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Shahar, Abdul Hadi

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Van Huylenbroeck, Stefaan

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Decoutere, Stefaan

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Drobny, Vladimir

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Acq. date: 2026-01-27