Publication:
Double patternig scheme for sub-0.25 k1 single damascene structures at NA=0.75, l=193nm
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1956 since deposited on 2021-10-16
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Acq. date: 2025-12-15
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1956 since deposited on 2021-10-16
2last month
2last week
Acq. date: 2025-12-15
Citations