Publication:

Epitaxial CVD growth of ultra-thin Si passivation layers on strained Ge Fin structures

Date

2017

Proceedings Paper

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Author(s)

;

Arimura, Hiroaki

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;

Witters, Liesbeth

;

Pourtois, Geoffrey

;

Schulze, Andreas

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Douhard, Bastien

;

Vanherle, Wendy

;

;

Richard, Olivier

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;

;

;

;

Collaert, Nadine

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Acq. date: 2026-10-08