Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth

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Author(s)

Lindsay, Richard

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Henson, Kirklen

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Vandervorst, Wilfried

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Giangrandi, Simone

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Van der Jeugd, Kees

Journal

Journal of Vacuum Science and Technology B

Metrics

1975 since deposited on 2021-10-15

Acq. date: 2025-10-23