Publication:

Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth

Date

2004
Journal article
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dc.contributor.authorLindsay, Richard
dc.contributor.authorHenson, Kirklen
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorMaex, Karen
dc.contributor.authorPawlak, Bartek
dc.contributor.authorDuffy, Ray
dc.contributor.authorSurdeanu, Radu
dc.contributor.authorStolk, Peter
dc.contributor.authorKittl, Jorge
dc.contributor.authorGiangrandi, Simone
dc.contributor.authorPagès, Xavier
dc.contributor.authorVan der Jeugd, Kees
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorPawlak, Bartek
dc.contributor.imecauthorVan der Jeugd, Kees
dc.date.accessioned2021-10-15T14:28:30Z
dc.date.available2021-10-15T14:28:30Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9205
dc.source.beginpage306
dc.source.endpage311
dc.source.issue1
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.volume22
dc.title

Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth

dc.typeJournal article
dspace.entity.typePublication
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