Publication:

Layout-induced stress effects in 14nm & 10nm FinFETs and their impact on performance

Date

2013

Proceedings Paper

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Files

26151.pdf 1.43 MB

Author(s)

Garcia Bardon, Marie

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;

;

Schuddinck, Pieter

;

;

Yakimets, Dmitry

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;

Van der Plas, Geert

;

Mercha, Abdelkarim

;

;

Verkest, Diederik

;

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Acq. date: 2026-04-07